IEEE MTT-S International Microwave Symposium digest · 2007 · 25 citations · 12 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsNanomaterialsNanotechnologyCarbon NanotubesDielectricsMems ReliabilityMems SwitchesNanotubesRf MemsCapacitive Mems SwitchesCapacitive Rf Mems SwitchesCarbon Nanotube Electrical ConductivityCarbon Nanotube NanocompositesDielectric ChargingOhmic Rf Mems SwitchesRf Mems ReliabilityRf Mems Switches
This paper presents the fabrication and experimental results of capacitive MEM switches with a carbon nanotubes (CNT) based dielectric for the first time to our knowledge. Double wall nanotubes (DWNT) have been incorporated in the switch silicon nitride dielectric to modify its properties regarding the charging effect. The impact of the CNT density on the MEMS reliability has been demonstrated: a switch lifetime enhancement greater than two orders of magnitude has been achieved.
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DC and AC Conductivity of Carbon Nanotubes−Polyepoxy Composites
Sophie Barrau, Philippe Demont, Alain Peigney et al. · Macromolecules · 2003 · 599 citations · Full text
Lifetime characterization of capacitive RF MEMS switches
C. Goldsmith, J. Ehmke, A. Malczewski et al. · 2002 · 341 citations