Publication | Closed Access
Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films
86
Citations
25
References
2007
Year
Materials ScienceMaterials EngineeringSi FilmsElastic ModulusNanocrystalline SicEngineeringApplied PhysicsCarbideThin FilmsAmorphous SolidThin Film ProcessingMicrostructure
| Year | Citations | |
|---|---|---|
Page 1
Page 1