Negative hydrogen ion densities and drift velocities in a multicusp ion source

Abstract

We have determined densities of negative hydrogen ions in a discharge by a laser detachment technique. We measured the electron density, the electron temperature, and the positive ion density using a Langmuir probe. We also performed extraction measurements. Combination of H− density measurements and extraction measurements yields information about the H− drift velocity. It was found that the velocity scaled with the square root of the electron temperature. All measurements were done as a function of discharge voltage, discharge current, and gas pressure. The densities are compatible with a semiquantitative model in which H− is produced by dissociative attachment of plasma electrons to vibrationally excited molecules and destroyed by wall collisions at very low pressure and collisions with H atoms, positive ions and/or hot thermal electrons at higher pressure.