Publication | Closed Access
Growth kinetics study in halide chemical vapor deposition of SiC
28
Citations
26
References
2005
Year
Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsGrowth Kinetics StudyCarbideSemiconductor Device FabricationChemical DepositionPulsed Laser DepositionChemical Vapor DepositionMicrostructure
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