A comparison of DLC film properties obtained by r.f. PACVD, IBAD, and enhanced pulsed-DC PACVD - Concepedia

Concepedia

Publication | Closed Access

A comparison of DLC film properties obtained by r.f. PACVD, IBAD, and enhanced pulsed-DC PACVD

56

Citations

37

References

2007

Year

V.J. Trava-Airoldi, L.F. Bonetti, G. Capote, E.J. Corat

Surface and Coatings Technology

Electrical EngineeringEngineeringApplied PhysicsDlc Film PropertiesPulse PowerPulsed-dc Pacvd

References

	Year	Citations

Page 1