IEEE Transactions on Microwave Theory and Techniques · 1992 · 34 citations · 10 references
EngineeringElectrical EngineeringPhysicsMicroelectronicsMicrowave EngineeringSemiconductor DevicesHigh-frequency Semiconductor DevicesMicrowave FiltersMicrowave Integrated CircuitsMicrowave MeasurementsMicrowave Semiconductor DevicesSuperconducting MaterialsCalibration TechniquesCryogenic Measurement TechniquesHigh-temperature SuperconductorsMicrowave MetrologyMicrowave Noise CharacterizationOn-wafer MeasurementOn-wafer Measurement TechniquesSuperconducting Filters
An on-wafer measurement setup for the microwave characterization of HEMTs and high-T/sub c/ superconductors at temperatures down to 20 K is presented. Both S-parameter and noise measurements can be performed in the frequency range from 45 MHz to 40 GHz and 2 GHz to 18 GHz, respectively, using standard calibration techniques and commercial microwave probe tips. Microwave measurements on a pseudomorphic FET and an AlGaAs-GaAs HEMT as well as investigations on a superconducting filter are presented to demonstrate the efficiency of the developed system.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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