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On-wafer microwave measurement setup for investigations on HEMTs and high-T/sub c/ superconductors at cryogenic temperatures down to 20 K
34
Citations
10
References
1992
Year
Superconducting MaterialCryogenic TemperaturesEngineeringMicrowave TransmissionRf SemiconductorCalibrationSuperconductivityMicrowave CharacterizationInstrumentationElectrical EngineeringPhysicsOn-wafer Measurement SetupAlgaas-gaas HemtHigh-t/sub C/ SuperconductorsMicrowave MeasurementMicrowave DiagnosticsMicroelectronicsMicrowave EngineeringMillimeter Wave TechnologyMeasurement SetupHigh-temperature SuperconductivityCryogenicsApplied Physics
An on-wafer measurement setup for the microwave characterization of HEMTs and high-T/sub c/ superconductors at temperatures down to 20 K is presented. Both S-parameter and noise measurements can be performed in the frequency range from 45 MHz to 40 GHz and 2 GHz to 18 GHz, respectively, using standard calibration techniques and commercial microwave probe tips. Microwave measurements on a pseudomorphic FET and an AlGaAs-GaAs HEMT as well as investigations on a superconducting filter are presented to demonstrate the efficiency of the developed system.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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