Concepedia

Publication | Closed Access

Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth

DOI

50

Citations

0

References

2001

Year

Y.C. Lim, Th. Westerwalbesloh, A. Aschentrup, O. Wehmeyer, G. Haindl, U. Kleineberg, U. Heinzmann
Applied Physics A

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