Applied Surface Science · 2014 · 32 citations · 25 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsCoatingsSemiconductor Thin FilmsSurface CoatingsThin Film Mechanical PropertiesThin-film DepositionThin-film MaterialsCeramic CoatingsFilm StressMultilayer Film MaterialsThermal StabilityThin Film Deposition Materials
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Nanometer scale multilayered hard coatings
P. Yashar, William D. Sproul · Vacuum · 1999 · 440 citations
Natural Sciences, Materials Engineering, Materials Science +14
New Routes in the Preparation of Mechanically Hard Films
William D. Sproul · Science · 1996 · 265 citations
Natural Sciences, Materials Engineering, Materials Science +17