Design and Operation of RSFQ Cell Library Fabricated by Using a 10-${\rm kA/cm}^{2}$ Nb Technology

Abstract

A 10-kA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> Nb/AlO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">chi</sub> /Nb junction technology for rapid single flux quantum (RSFQ) integrated circuits has been developed. Modifying our standard 1.6-kA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> cell library, we have implemented elementary cells used to build RSFQ digital-to-analog converters for ac voltage standard applications. The 10-kA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> library cells have been fabricated by utilizing existing process tools. Correct operations of the circuits have been confirmed at low speed. The maximum operating frequencies evaluated by an average-voltage measurement technique were consistent with the scaling rules of RSFQ circuits.