High-efficiency amorphous silicon solar cells: Impact of deposition rate on metastability

Abstract

Hydrogenated amorphous silicon (a-Si:H) films, used for light absorbers of p-i-n solar cells, were deposited at various deposition rates (Rd) ranging over two orders of magnitude (Rd ∼ 2 × 10−3–3 × 10−1 nm/s) by using diode and triode plasma-enhanced chemical vapor deposition (PECVD). The impact of varying Rd on the light-soaking stability of the solar cells has been investigated. Although a reduction of Rd mitigates the light-induced degradation in the typical range of Rd (>10−1 nm/s), it remains present even in the very low Rd (<10−2 nm/s), indicating that the metastable effect persists in a-Si:H regardless of Rd. The best performing cell, whose a-Si:H absorber is characterized by low amount of metastable defect and high bandgap, can be obtained at Rd of ∼1–3 × 10−2 nm/s by triode PECVD. By applying such a-Si:H in the improved p-i-n devices, we demonstrate two record independently confirmed stabilized efficiencies of 10.22% for single-junction and 12.69% for a-Si:H/hydrogenated microcrystalline silicon (μc-Si:H) tandem solar cells.