Synthesis of carbon clusters and thin films by low temperature plasma chemical vapor deposition under atmospheric pressure - Concepedia

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Synthesis of carbon clusters and thin films by low temperature plasma chemical vapor deposition under atmospheric pressure

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1996

Year

Hideomi Koinuma, Takao Horiuchi, Kiyoto Inomata, Heon‐Cheol Ha, Kiyotaka Nakajima, Khaliq A. Chaudhary

Pure and Applied Chemistry

Materials ScienceEngineeringCarbon-based MaterialAtmospheric PressureChemical Vapor DepositionChemistryThin FilmsChemical DepositionPlasma ProcessingCarbon Clusters

Abstract

Abstract