Pure and Applied Chemistry · 1996 · 16 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsPhysical ChemistryThin FilmsCarbon NanomaterialsChemical Vapor DepositionLow-temperature PlasmasThin-film DepositionAtmospheric Pressure Chemical Vapor DepositionAtmospheric-pressure PlasmasCarbon-based NanomaterialsPlasma-assisted Chemical Vapor DepositionPlasma-assisted Synthesis
Abstract