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Toward smooth MWPECVD diamond films: Exploring the limits of the hydrogen percentage in Ar/H2/CH4 gas mixture

Materials ScienceMaterials EngineeringChemical EngineeringDiamond-like CarbonEngineeringSurface ScienceApplied PhysicsMwpecvd Diamond FilmsSolid-state ChemistryAr/h2/ch4 Gas MixtureHydrogenChemical Vapor DepositionHydrogen Percentage