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Quantitative thermal desorption spectrometry of ionically implanted inert gases—I. Fundamental aspects

Materials ScienceChemical EngineeringEngineeringAnalytical InstrumentationNatural SciencesSpectroscopyMass SpectrometryAnalytical ChemistryInert Gases—iThermodynamicsChemistryThermoanalytical MethodFundamental AspectsChemical KineticsIon Process