Electrical probing for dimensional micro metrology

Surface Studies by Scanning Tunneling Microscopy

G. Binnig, H. Rohrer, Ch. Gerber et al. · Physical Review Letters · 1982 · 4.6K citations · Full text

Natural Sciences, Materials Science, Physics +14

Generalized Formula for the Electric Tunnel Effect between Similar Electrodes Separated by a Thin Insulating Film

J.G. Simmons · Journal of Applied Physics · 1963 · 4.1K citations

Natural Sciences, Electrical Engineering, Materials Science +15

Probing Systems in Dimensional Metrology

Albert Weckenmann, Tyler Estler, G.N. Peggs et al. · CIRP Annals · 2004 · 331 citations

Engineering, Physics, Geometry +11

The Topografiner: An Instrument for Measuring Surface Microtopography

Russell D. Young, John F. Ward, Fredric Scire · Review of Scientific Instruments · 1972 · 328 citations

Natural Sciences, Materials Engineering, Materials Science +16

Dimensional Micro and Nano Metrology

Hans Nørgaard Hansen, K. Carneiro, Han Haitjema et al. · CIRP Annals · 2006 · 326 citations

Engineering, Materials Engineering, Materials Science +14