Fabrication and characteristics of out-of-plane piezoelectric micro grippers using MEMS processes - Concepedia

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Fabrication and characteristics of out-of-plane piezoelectric micro grippers using MEMS processes

17

Citations

7

References

2006

Year

Chang-Seong Jeon, Joon‐Shik Park, Sang-Yeol Lee, Chanwoo Moon

Thin Solid Films

Materials ScienceEnergy HarvestingEngineeringMicromachinesMicrofabricationPiezoelectric NanogeneratorsMechanical EngineeringPiezoelectric MaterialMems ProcessesMicroactuatorMicroelectronicsMicro-electromechanical System

References

	Year	Citations

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