Numerical analysis of quantum dots on off-normal incidence ion sputtered surfaces

Abstract

We implement substrate rotation in a $2+1$-dimensional solid-on-solid model of ion-beam sputtering of solid surfaces. With this extension of the model, we study the effect of concurrent rotation, as the surface is sputtered, on possible topographic regions of surface patterns. In particular, we perform a detailed numerical analysis of the time evolution of dots obtained from our Monte Carlo simulations at off-normal-incidence sputter erosion. We found the same power-law scaling exponents of the dot characteristics for two different sets of ion-material combinations, without and with substrate rotation.