Graded PZT thin film capacitors with stoichimetric variation by MOD technique

Abstract

Abstract By tailoring Zr/Ti ratio in Pb(Zr,Ti)O3 from 45/55 to 75/25, functionally graded PZT thin films were prepared by metal organic decomposition (MOD) technique. P-E hysteresis loops were measured, and polarization was found to shift up or down depending on the direction of the composition gradients of the PZT. This polarization offset was modeled using Poisson's equation in one dimension. Switching charge was also found to be compositional gradient direction dependent.