Sensors and Actuators B Chemical · 2000 · 159 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionSurface OxidationSurface PhysicsThin Film Electrical PropertiesThin-film MaterialsSurface Oxidation MechanismsThermal EvaporationThin Oxide FilmsThin-film OxidesThin-film Sensor Materials
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Tadashi Takada, Kengo Suzuki, Masanori NAKANE · Sensors and Actuators B Chemical · 1993 · 156 citations