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Investigation on the O3 sensitivity properties of WO3 thin films prepared by sol–gel, thermal evaporation and r.f. sputtering techniques

Materials ScienceMaterials EngineeringSurface CharacterizationMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceApplied PhysicsWo3 Thin FilmsThermal EvaporationThin Film Process TechnologyThin FilmsO3 Sensitivity PropertiesThin Film Processing