Concepedia

Publication | Closed Access

Wafer bonding for microsystems technologies

DOI

83

Citations

41

References

1999

Year

U. Gösele, Qiaoling Tong, Andreas Schumacher, G. Kräuter, Manfred Reiche, A. Plößl, P. Kopperschmidt, T.-H. Lee, W.-J. Kim
Sensors and Actuators A Physical

References

YearCitations

Page 1