Coupled effects of bombarding ions energy on the microstructure and stress level of RFPECVD a-C:H films: correlation with Raman spectroscopy - Concepedia

Concepedia

Publication | Closed Access

Coupled effects of bombarding ions energy on the microstructure and stress level of RFPECVD a-C:H films: correlation with Raman spectroscopy

12

Citations

21

References

2003

Year

E. Tomasella, L. Thomas, C. Meunier, Marie-Hélène Nadal, S. Mikhailov

Surface and Coatings Technology

Materials ScienceMaterial AnalysisEngineeringApplied PhysicsCoupled EffectsStress LevelVacuum DeviceIons EnergyChemical Vapor DepositionThin Film Processing

References

	Year	Citations

Page 1