Sub-hundred nanosecond reconfiguration capabilities of nanogap RF MEMS switched capacitor

Abstract

This paper presents a novel mechanical design applied to RF MEMS miniature capacitors. The main idea is to take benefit of superior structural material properties in order to enhance both switching speeds and reliability of RF MEMS components. As a proof of concept, miniature micro-beams fabricated from a composite multilayer assembly have demonstrated switching time lower than 50 ns. To our knowledge, it is the first time that such switching speed reconfiguration is shown on RF MEMS structure. Such performance has been possible by using a nanogap electrostatic actuators combined 4 MHz mechanical structures. Several RF MEMS switched capacitors have been fabricated with capacitance ratio between 2.4 to 2.8.