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Piezoelectric thin films for MEMS applications—A comparative study of PZT, 0.7PMN–0.3PT and 0.9PMN–0.1PT thin films grown on Si by r.f. magnetron sputtering

Materials ScienceEngineeringApplied PhysicsThin Film MaterialsPiezoelectric MaterialsPiezoelectricityThin Film DevicesPiezoelectric MaterialThin FilmsThin Film Process TechnologyMicroelectronicsComparative StudyThin Film ProcessingPiezoelectric Thin Films