37
Publications
1K
Citations
20
H-Index
2002
Active since
Caroline Soyer is an author at Institut d'électronique de microélectronique et de nanotechnologie specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsThin FilmsMaterials EngineeringElectrical EngineeringSurface ScienceMicrofabricationMicroelectronicsBiomedical Engineering
Publications per year
2002–2019
37
37
Kätlin Rohtlaid, Giao Nguyen, Caroline Soyer et al. · Advanced Electronic Materials · 2019 · 51 citations · Full text
Caroline Soyer, Éric Cattan, Denis Rémiens et al. · Journal of Applied Physics · 2002 · 48 citations
Engineering, Electron-beam Lithography, Thin Film Process Technology +18
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