Concepedia

Publication | Closed Access

A new secondary ion mass spectrometry (SIMS) system with high-intensity cluster ion source

DOI

66

Citations

15

References

2004

Year

Jiro Matsuo, Chihiro Okubo, Toshio Seki, Takaaki Aoki, Noriaki Toyoda, Isao Yamada
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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