Focused-ion-beam-induced tungsten deposition for IC repair - Concepedia

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Focused-ion-beam-induced tungsten deposition for IC repair

13

Citations

2

References

1993

Year

F.C. van den Heuvel, M.H.F. Overwijk, E. M. Fleuren, H. Laisina, K.J. Sauer

Microelectronic Engineering

Materials EngineeringMaterials ScienceIon ImplantationEngineeringFocused-ion-beam-induced Tungsten DepositionApplied PhysicsIon BeamMicroelectronics

References

	Year	Citations

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