Role of barrier layers in electroluminescence from SiN-based multilayer light-emitting devices

Abstract

We report the effects of barrier layer on the electroluminescence properties of the SiN-based multilayer light-emitting devices (LEDs). It is found that the emission efficiency is significantly enhanced by more than one order of magnitude compared to that of LED without barrier layer. Meanwhile, the emission wavelength can also be tuned from 620to510nm by controlling the Si∕N ratio of the barrier layer. The improved performance of LEDs can be attributed to the variation in the band offset between the Si-rich SiN well layer and the N-rich SiN barrier layer.