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Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent

Materials ScienceChemical EngineeringOrganic SolventEngineeringMicrofabricationOptical PropertiesOptical GlassLaser ApplicationsGlass MaterialLaser-assisted DepositionMicro-optical ComponentLaser-surface InteractionsSurface Micro-fabricationExcimer Laser Irradiation