Solid-State Electronics · 1963 · 10 citations · 2 references
Materials ScienceEngineeringMicrofabricationMechanical EngineeringStressstrain AnalysisSolid MechanicsThin Film DevicesThin FilmsElectronic PackagingMechanical Stress ConsiderationsMechanics Of MaterialsThin Film Processing
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Stress Anisotropy in Silicon Oxide Films
Joseph Priest, Hollis L. Caswell, Y. Budo · Journal of Applied Physics · 1963 · 48 citations · Full text