Concepedia

Publication | Closed Access

Characterization of low-k dielectric trench surface cleaning after a fluorocarbon etch

DOI

20

Citations

7

References

2004

Year

Serena Y. Tan, Simon Y.M. Chooi, Chian-Yuh Sin, Ping-Yu Ee, Madhavi Srinivasan, Simo O. Pehkonen
Thin Solid Films

References

YearCitations

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