Publication | Closed Access
Direct e-beam lithography of PDMS
27
Citations
12
References
2012
Year
Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationApplied PhysicsElectronic PackagingDirect E-beam LithographyOptoelectronicsNanolithography Method
| Year | Citations | |
|---|---|---|
Page 1
Page 1