Publication | Closed Access
Factors influencing adhesion of fluorocarbon (FC) thin film on silicon substrate
10
Citations
25
References
2007
Year
Materials ScienceEngineeringMicrofabricationAdhesive MaterialSurface ScienceApplied PhysicsThin FilmsSilicon SubstrateThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1