Experimental and theoretical studies on N 1s levels of silicon oxynitride films - Concepedia

Concepedia

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Experimental and theoretical studies on N 1s levels of silicon oxynitride films

25

Citations

29

References

2002

Year

Masao Takahashi, Toshiko Mizokuro, Yasushiro Nishioka, Hikaru Kobayashi

Surface Science

Materials ScienceEngineeringPhysicsOxide ElectronicsSurface ScienceApplied PhysicsN 1SSemiconductor MaterialTheoretical StudiesSilicon On InsulatorMicroelectronicsThin Film Processing

References

	Year	Citations

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