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Thickness dependence of D.C. leakage current in lead zirconate-titanate (PZT) memories
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Citations
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References
1992
Year
Electrical EngineeringThickness DependenceEngineeringPhysicsHigh Voltage EngineeringD.c. Leakage CurrentsStress-induced Leakage CurrentApplied PhysicsCondensed Matter PhysicsQuantum MaterialsTemperature DependenceConstant VoltageSemiconductor MemoryMicroelectronicsPhase Change MemoryD.c. LeakageLead Zirconate-titanateElectrical Insulation
Abstract We have measured the voltage (field) dependence, the thickness dependence, and the temperature dependence of d.c. leakage currents in PbZr0.40Ti0.60O3. In agreement with our earlier results [Scott et al., J. Appl. Phys. 70, 382 (1991)], the voltage dependence is given by I(V) = AV + B(V - V 0)2, implying space-charge limited currents. In addition, in the present work we find that I(d) = C/d 3 at constant voltage, where d is the thickness and C is a constant dependent upon voltage and cross-sectional area. This inverse-cubic dependence of current confirms that the leakage is dominated by space charge effects.
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