RBS/channeling study on the annealing behavior of Cu thin films on Si(100) and (111) substrates

Takehiko Nakahara, Shigeharu Ohkura, Fumiya Shoji, Teruo Hanawa, Kenjiro Oura

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1990 · 17 citations · 10 references

Concepts

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