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Cubic boron nitride films by d.c. and r.f. magnetron sputtering: layer characterization and process diagnostics

Materials ScienceCubic BoronBoron NitrideEngineeringPhysicsHexagonal Boron NitrideCubic Boron NitrideApplied PhysicsCondensed Matter PhysicsMagnetron SputteringLayer CharacterizationThin FilmsThin Film Processing