Properties of amorphous silicon carbide films prepared by PECVD - Concepedia

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Properties of amorphous silicon carbide films prepared by PECVD

18

Citations

2

References

1996

Year

J. Huran, L. Hrubčín, A.P. Kobzev, Jozef Liday

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsThin FilmsAmorphous SolidThin Film ProcessingCarbide

References

	Year	Citations

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