Superlattices and Microstructures · 2004 · 13 citations · 2 references
EngineeringMechanical EngineeringPhysicsHeat TransferMicroelectromechanical SystemsMicrofabricationDissipative SystemsHeat Transfer ModelingOptical MemsMicro-scale Heat TransferMicroscale Heat ConductionNanometer-scale Displacement MeasurementPhotothermal EffectsThermal Micropositioning
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