Concepedia

Effect of substrate temperature on the crystallization of Pb(Zr,Ti)O3 films on Pt/Ti/Si substrates prepared by radio frequency magnetron sputtering with a stoichiometric oxide target

Reji Thomas, Shoichi Mochizuki, Toshiyuki Mihara, Tadashi Ishida

Materials Science and Engineering B · 2002 · 33 citations · 13 references

DOI

Concepts

References

13

JCPDS-International Centre for Diffraction Data

C. R. Hubbard, Gregory J. McCarthy · Acta Crystallographica Section A Foundations of Crystallography · 1981 · 1.8K citations · Full text

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Science and technology of ferroelectric films and heterostructures for non-volatile ferroelectric memories

R. Ramesh, S. Aggarwal, Orlando Auciello · Materials Science and Engineering R Reports · 2001 · 266 citations

, , +14

Crystallization of sputtered lead zirconate titanate films by rapid thermal processing

Chandra Kumar, R. Pascual, M. Sayer · Journal of Applied Physics · 1992 · 148 citations

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Multi-ion-beam reactive sputter deposition of ferroelectric Pb(Zr,Ti)O3 thin films

S. B. Krupanidhi, H. Hu, V.V. Siva Kumar · Journal of Applied Physics · 1992 · 130 citations

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Crystallization of sol-gel derived lead zirconate titanate thin films

S. S. Dana, Konstantin Etzold, J. B. Clabes · Journal of Applied Physics · 1991 · 85 citations

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