Publication | Closed Access

Development of a double-microcantilever for surface stress measurement in microsensors

Materials ScienceEngineeringMicromachinesMicrofabricationMechanical EngineeringAnalytical MicrosystemsMicroelectromechanical SystemsBiomedical EngineeringSensor DesignSurface Stress MeasurementMicrofluidicsMicro-electromechanical System