Publication | Open Access

Boron-doped hydrogenated microcrystalline silicon oxide (μc-SiOx:H) for application in thin-film silicon solar cells

Materials ScienceEngineeringOxide ElectronicsApplied PhysicsMicrocrystalline Silicon OxideSemiconductor Device FabricationThin Film Process TechnologyThin FilmsPhotovoltaicsThin Film ProcessingSolar Cell Materials