Concepedia

Polysilicon strain-gauge transducers

V.A. Gridchin, V.M. Lubimskyi, M.P. Sarina

Sensors and Actuators A Physical · 1992 · 13 citations · 4 references

DOI

References

4

Piezoresistance in polysilicon and its applications to strain gauges

P.J. French, A G R Evans · Solid-State Electronics · 1989 · 185 citations

, , +7

Piezoresistive properties of polycrystalline and crystalline silicon films

Daniela Schubert, W. Jenschke, Tino Uhlig et al. · Sensors and Actuators · 1987 · 60 citations

, , +14

Polycrystalline silicon-on-metal strain gauge transducers

J.C. Erskine · IEEE Transactions on Electron Devices · 1983 · 37 citations

, , +17

Piezoresistive elements of polycrystalline semiconductor thin films

Yosiharu Onuma, Kiichi Kamimura, Yasuhiro Homma · Sensors and Actuators · 1988 · 19 citations

, , +13