Concepedia

Publication | Closed Access

AC powered reactive magnetron deposition of indium tin oxide (ITO) films from a metallic target

DOI

24

Citations

16

References

2006

Year

H. Küpfer, Ronny Kleinhempel, Benjamin Graffel, Th. Welzel, Th. Dunger, Frank Richter, Wolf‐Michael Gnehr, T. Kopte
Surface and Coatings Technology

References

YearCitations

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