A dome-shaped cavity type microwave plasma chemical vapor deposition reactor for diamond films deposition

Novel microwave plasma reactor for diamond synthesis

M. Füner, C. Wild, P. Koidl · Applied Physics Letters · 1998 · 200 citations

Materials Science, Electrical Engineering, Engineering +13

Self-consistent microwave field and plasma discharge simulations for a moderate pressure hydrogen discharge reactor

K. Hassouni, T.A. Grotjohn, A. Gicquel · Journal of Applied Physics · 1999 · 171 citations

Self-consistent Microwave Field, Engineering, Plasma Science +17

Microwave engineering of plasma-assisted CVD reactors for diamond deposition

François Silva, K. Hassouni, X. Bonnin et al. · Journal of Physics Condensed Matter · 2009 · 159 citations

Materials Science, Electrical Engineering, Homogeneous Diamond Deposition +10

Simulation and development of optimized microwave plasma reactors for diamond deposition

M. Füner, C. Wild, P. Koidl · Surface and Coatings Technology · 1999 · 100 citations

Diamond-like Carbon, Electrical Engineering, Engineering +6

Spectroscopic analysis and chemical kinetics modeling of a diamond deposition plasma reactor

A. Gicquel, K. Hassouni, Samir Farhat et al. · Diamond and Related Materials · 1994 · 98 citations

Chemical Engineering, Engineering, Chemical Kinetics Modeling +6