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A piezoresistive bridge-microcantilever biosensor by CMOS process for surface stress measurement

EngineeringFlexible ElectronicsMicrofabricationMechanical EngineeringBioelectronicsPiezoresistive Bridge-microcantilever BiosensorNano Electro Mechanical SystemSensor DesignBiomedical EngineeringSurface Stress MeasurementMicrofluidicsCmos ProcessFlexible Sensor