Publication | Closed Access
Formation of highly oriented diamond film on carburized (100) Si substrate
62
Citations
16
References
1995
Year
Materials EngineeringMaterials ScienceDiamond FilmSi SubstrateEngineeringDiamond-like CarbonMicrofabricationNanotechnologySurface ScienceApplied PhysicsSemiconductor Device FabricationChemical Vapor DepositionThin Film Processing
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