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Study of boron doping in MPCVD grown homoepitaxial diamond layers based on cathodoluminescence spectroscopy, secondary ion mass spectroscopy and capacitance–voltage measurements

Materials EngineeringMaterials ScienceCapacitance–voltage MeasurementsDiamond-like CarbonEngineeringBoron NitrideCathodoluminescence SpectroscopyApplied PhysicsEpitaxial GrowthBoron Doping