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Sputter deposition from a Ti2AlC target: Process characterization and conditions for growth of Ti2AlC

DOIFull Paper Access

91

Citations

26

References

2009

Year

Jenny Frodelius, Per Eklund, Markus Beckers, Per O. Å. Persson, Hans Högberg, L. Hultman
Thin Solid Films

References

YearCitations

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