Publication | Closed Access
Surface characterisation of thin solid foil targets by ion impact
18
Citations
18
References
1988
Year
Materials ScienceMaterials EngineeringEngineeringImpact (Mechanics)PhysicsMicrofabricationTarget FabricationSurface ScienceApplied PhysicsIon BeamIon EmissionSecondary Electron SpectroscopyIon ImpactThin Solid FoilsSurface Characterisation
The characterise the surface condition of thin solid foils (x approximately=1000 AA) by ion impact, a novel combination of different independent methods of control has been used: (1) Auger electron spectroscopy (AES); (2) secondary electron spectroscopy (SES); (3) measurement of the total electron coefficient gamma ; and (4) detection of elastically scattered projectiles. Surfaces of various elemental foils (6<or=ZT<or=83) have been carefully prepared by heavy-ion- (Kr+-) induced sputtering. Coverage could be removed from the target surfaces (better than 0.3 remaining monolayers) and the roughness could be reduced considerably.
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