Publication | Closed Access
Single-spot e-beam lithography for defining large arrays of nano-holes
23
Citations
5
References
2014
Year
Single-spot E-beam LithographyEngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanotechnologyApplied PhysicsNanolithographyNanofabricationNanolithography Method
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