Concepedia

Publication | Closed Access

Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD

DOI

29

Citations

14

References

2007

Year

R. Dey, S.B. Singh, A. Biswas, R.B. Tokas, Navin Chand, Selvaraj Venkateshwaran, Debarati Bhattacharya, N. K. Sahoo, Suresh Gosavi, S. K. Kulkarni,
Current Applied Physics

References

YearCitations

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